Nitrogen trifluoride

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  • Identifiers

    CAS number
    7783-54-2

    Molecular formula
    F3N

    SMILES
    N(F)(F)F

    Safety labels

    Oxidizer
    Oxidizer

    Compressed Gas
    Compressed Gas

    Irritant
    Irritant

    Health Hazard
    Health

  • Odor profile

    Fragrance
    Odorless 63.72%
    Fishy 46.39%
    Sweet 21.98%
    Ripe 21.55%
    Cheesy 19.16%
    Animal 15.8%
    Savory 15.23%
    Oily 13.24%
    Meaty 13.21%
    Cooling 13.07%

     

    Flavor
    Odorless 43.28%
    Sulfury 24.81%
    Sulfurous 22.65%
    Fishy 22.61%
    Meaty 20.67%
    Mild 20.13%
    Rotten 18.73%
    Bloody 18.61%
    Glue 18.52%
    Sweet-like 18.47%

     

    Odor impact est.
    Low

  • Properties

    XLogP3-AA
    1.9

    pKa est.
    2.14 (strong acid)

    Molecular weight
    71.002 g/mol

    Melting point expt.

    • -340 °F (NIOSH, 2024)
    • -208.79 °C
    • Heat of fusion at the melting point = 3.9794x10+5 J/kmol
    • -208.5 °C
    • -343.8 °F
    • -340 °F

    Boiling point

    • -200 °F at 760 mmHg (NIOSH, 2024)
    • -128.75 °C
    • Trouton constant: 19.9; decomposed by electric sparks; inert chemically; liquid at boiling point
    • -129 °C
    • -200 °F

    Flash point

    • 53.13 ˚C est.

    Solubility expt.

    • Slight (NIOSH, 2024)
    • Water solubility = 1.4X10-5 mol NF3/mol H2O at 25 °C and 101.3 kPa
    • Insoluble in water
    • Solubility in water: none
    • Slight

  • Synonyms

    • NITROGEN TRIFLUORIDE
    • Trifluoroamine
    • Nitrogen fluoride
    • Trifluoroammonia
    • 7783-54-2
    • Perfluoroammonia
    • Nitrogen fluoride (NF3)
    • trifluoroazane
    • UN2451
    • HSDB 1113
    • trifluoridonitrogen
    • EINECS 232-007-1
    • UNII-4402F4X0RH
    • Nitrogen trifluoride, compressed
    • 4402F4X0RH
    • DTXSID4040181
    • CHEBI:30231
    • EC 232-007-1
    • UN-2451
    • Trifluoramine
    • Trifluorammonia
    • NF3
    • (NF3)
    • [NF3]
    • NF(3) gas
    • N,N,N-Trifluoroamine #
    • Nitrogen trifluoride 99%
    • NITROGEN FLUORIDE [MI]
    • DTXCID2020181
    • MFCD00042549
    • UN 2451
    • NS00043980
    • Q413835
    • Nitrogen trifluoride, compressed [UN2451] [Nonflammable gas]
    • 232-007-1

  • Applications

    Nitrogen trifluoride (CAS 7783-54-2) is a fluorine-containing etchant gas widely used in electronics-related manufacturing. Primary applications include plasma etching of silicon, silicon dioxide, and silicon nitride films in semiconductor and MEMS device fabrication; dry etching for display and photovoltaic manufacturing; chamber cleaning where NF3 or its decomposition products remove refractory residues from CVD/etch reactors between process steps; used as a fluorine source in high-etch-rate dry processing for electronics materials and thin films; and due to its high global warming potential it is typically managed with abatement and emissions-control systems.

    gpt-5-nano

  • Solubility @25˚C

    Solvent Solubility (g/L)
    ethanol 136.63
    methanol 214.26
    isopropanol 122.89
    water 61.33
    ethyl acetate 32.02
    n-propanol 93.77
    acetone 97.19
    n-butanol 72.97
    acetonitrile 76.82
    DMF 332.74
    toluene 14.33
    isobutanol 65.67
    1,4-dioxane 80.33
    methyl acetate 49.3
    THF 132.17
    2-butanone 53.51
    n-pentanol 44.09
    sec-butanol 78.67
    n-hexane 11.16
    ethylene glycol 94.46
    NMP 187.2
    cyclohexane 10.44
    DMSO 385.0
    n-butyl acetate 21.53
    n-octanol 27.8
    chloroform 32.84
    n-propyl acetate 21.65
    acetic acid 91.15
    dichloromethane 43.36
    cyclohexanone 45.62
    propylene glycol 75.18
    isopropyl acetate 22.96
    DMAc 220.47
    2-ethoxyethanol 78.56
    isopentanol 55.34
    n-heptane 10.8
    ethyl formate 42.58
    1,2-dichloroethane 39.07
    n-hexanol 35.3
    2-methoxyethanol 159.6
    isobutyl acetate 12.18
    tetrachloromethane 11.27
    n-pentyl acetate 21.87
    transcutol 72.8
    n-heptanol 28.64
    ethylbenzene 9.31
    MIBK 27.07
    2-propoxyethanol 67.1
    tert-butanol 141.78
    MTBE 66.38
    2-butoxyethanol 49.38
    propionic acid 64.48
    o-xylene 17.31
    formic acid 108.27
    diethyl ether 59.99
    m-xylene 12.83
    p-xylene 11.6
    chlorobenzene 13.67
    dimethyl carbonate 36.42
    n-octane 5.34
    formamide 144.99
    cyclopentanone 74.36
    2-pentanone 41.01
    anisole 23.23
    cyclopentyl methyl ether 48.37
    gamma-butyrolactone 85.9
    1-methoxy-2-propanol 119.17
    pyridine 53.74
    3-pentanone 35.0
    furfural 77.23
    n-dodecane 4.46
    diethylene glycol 74.67
    diisopropyl ether 19.19
    tert-amyl alcohol 91.48
    acetylacetone 37.4
    n-hexadecane 4.57
    acetophenone 23.55
    methyl propionate 44.24
    isopentyl acetate 19.18
    trichloroethylene 37.18
    n-nonanol 24.55
    cyclohexanol 45.77
    benzyl alcohol 27.24
    2-ethylhexanol 20.81
    isooctanol 23.04
    dipropyl ether 30.51
    1,2-dichlorobenzene 13.13
    ethyl lactate 24.89
    propylene carbonate 38.3
    n-methylformamide 147.23
    2-pentanol 49.47
    n-pentane 17.85
    1-propoxy-2-propanol 49.83
    1-methoxy-2-propyl acetate 26.15
    2-(2-methoxypropoxy) propanol 42.7
    mesitylene 10.53
    ε-caprolactone 40.62
    p-cymene 11.57
    epichlorohydrin 65.28
    1,1,1-trichloroethane 21.56
    2-aminoethanol 111.64
    morpholine-4-carbaldehyde 128.3
    sulfolane 127.28
    2,2,4-trimethylpentane 8.47
    2-methyltetrahydrofuran 71.1
    n-hexyl acetate 25.7
    isooctane 5.7
    2-(2-butoxyethoxy)ethanol 49.83
    sec-butyl acetate 14.12
    tert-butyl acetate 27.05
    decalin 5.01
    glycerin 95.18
    diglyme 83.36
    acrylic acid 67.46
    isopropyl myristate 14.84
    n-butyric acid 51.28
    acetyl acetate 18.83
    di(2-ethylhexyl) phthalate 17.36
    ethyl propionate 23.62
    nitromethane 117.67
    1,2-diethoxyethane 30.56
    benzonitrile 23.23
    trioctyl phosphate 15.42
    1-bromopropane 30.55
    gamma-valerolactone 82.4
    n-decanol 19.99
    triethyl phosphate 16.5
    4-methyl-2-pentanol 29.36
    propionitrile 53.0
    vinylene carbonate 35.76
    1,1,2-trichlorotrifluoroethane 64.02
    DMS 21.88
    cumene 9.28
    2-octanol 22.95
    2-hexanone 24.29
    octyl acetate 18.94
    limonene 16.42
    1,2-dimethoxyethane 108.66
    ethyl orthosilicate 16.56
    tributyl phosphate 15.56
    diacetone alcohol 46.87
    N,N-dimethylaniline 29.04
    acrylonitrile 67.36
    aniline 32.33
    1,3-propanediol 96.57
    bromobenzene 10.28
    dibromomethane 33.38
    1,1,2,2-tetrachloroethane 40.09
    2-methyl-cyclohexyl acetate 17.35
    tetrabutyl urea 25.99
    diisobutyl methanol 18.2
    2-phenylethanol 24.03
    styrene 10.65
    dioctyl adipate 19.55
    dimethyl sulfate 64.61
    ethyl butyrate 20.81
    methyl lactate 48.7
    butyl lactate 25.57
    diethyl carbonate 16.05
    propanediol butyl ether 48.5
    triethyl orthoformate 19.35
    p-tert-butyltoluene 12.79
    methyl 4-tert-butylbenzoate 35.86
    morpholine 104.14
    tert-butylamine 97.5
    n-dodecanol 16.64
    dimethoxymethane 136.58
    ethylene carbonate 30.33
    cyrene 38.45
    2-ethoxyethyl acetate 25.59
    2-ethylhexyl acetate 15.63
    1,2,4-trichlorobenzene 16.16
    4-methylpyridine 47.37
    dibutyl ether 20.75
    2,6-dimethyl-4-heptanol 18.2
    DEF 72.54
    dimethyl isosorbide 50.5
    tetrachloroethylene 30.41
    eugenol 38.06
    triacetin 25.1
    span 80 37.96
    1,4-butanediol 46.12
    1,1-dichloroethane 31.45
    2-methyl-1-pentanol 33.39
    methyl formate 94.98
    2-methyl-1-butanol 54.93
    n-decane 6.13
    butyronitrile 44.4
    3,7-dimethyl-1-octanol 22.51
    1-chlorooctane 13.58
    1-chlorotetradecane 7.78
    n-nonane 6.09
    undecane 5.11
    tert-butylcyclohexane 5.44
    cyclooctane 4.7
    cyclopentanol 65.43
    tetrahydropyran 59.38
    tert-amyl methyl ether 51.84
    2,5,8-trioxanonane 64.95
    1-hexene 21.45
    2-isopropoxyethanol 47.71
    2,2,2-trifluoroethanol 46.69
    methyl butyrate 30.65

    Scent© AI

1 4

IFRA standard 51

Recommendation
No restriction
Maximum acceptable concentrations in the finished product (%)
Category 1
Products applied to the lips
 No restriction Category 7A
Rinse-off products applied to the hair with some hand contact
 No restriction
Category 2
Products applied to the axillae
 No restriction Category 7B
Leave-on products applied to the hair with some hand contact
 No restriction
Category 3
Products applied to the face/body using fingertips
 No restriction Category 8
Products with significant anogenital exposure
 No restriction
Category 4
Products related to fine fragrance
 No restriction Category 9
Products with body and hand exposure, primarily rinse off
 No restriction
Category 5A
Body lotion products applied to the body using the hands (palms), primarily leave on
 No restriction Category 10A
Household care products with mostly hand contact
 No restriction
Category 5B
Face moisturizer products applied to the face using the hands (palms), primarily leave on
 No restriction Category 10B
Household care products with mostly hand contact, including aerosol/spray products (with potential leave-on skin contact)
 No restriction
Category 5C
Hand cream products applied to the hands using the hands (palms), primarily leave on
 No restriction Category 11A
Products with intended skin contact but minimal transfer of fragrance to skin from inert substrate without UV exposure
 No restriction
Category 5D
Baby Creams, baby Oils and baby talc
 No restriction Category 11B
Products with intended skin contact but minimal transfer of fragrance to skin from inert substrate with potential UV exposure
 No restriction
Category 6
Products with oral and lip exposure
 No restriction Category 12
Products not intended for direct skin contact, minimal or insignificant transfer to skin
 No restriction