Hexafluorodisilane

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  • Identifiers

    CAS number
    13830-68-7

    Molecular formula
    F6Si2

    SMILES
    F[Si](F)(F)[Si](F)(F)F

  • Odor profile

    Fragrance
    Odorless 68.0%
    Fishy 27.28%
    Sweet 20.46%
    Cooling 16.65%
    Savory 16.59%
    Ripe 12.99%
    Clean 12.7%
    Animal 12.48%
    Bitter 11.45%
    Oily 11.41%

     

    Flavor
    Odorless 36.99%
    Bland 20.94%
    Sulfurous 19.54%
    Mild 19.13%
    Sweet-like 18.06%
    Glue 17.55%
    Bloody 17.55%
    Bouillon 17.33%
    Rotten 17.09%
    Skunky 16.98%

     

    Odor impact est.
    Low

  • Properties

    pKa est.
    -3.8 (strong acid)

    Molecular weight
    170.16 g/mol

    Flash point

    • -27.87 ˚C est.

  • Synonyms

    • Hexafluorodisilane
    • 13830-68-7
    • trifluoro(trifluorosilyl)silane
    • DTXSID70160564
    • Si2F6
    • Hexafluordisilan
    • DTXCID9083055
    • Disilane, 1,1,1,2,2,2-hexafluoro-

  • Applications

    Hexafluorodisilane (CAS 13830-68-7) may be used as a silicon-containing precursor in chemical vapor deposition (CVD) or atomic layer deposition (ALD) to deposit silicon-containing thin films for electronics applications. It may also serve as a precursor for fluorinated silicon-containing coatings and polymers intended to enhance chemical resistance and low-friction properties. It is also used as an intermediate in the synthesis of organosilicon fluorinated compounds. In electronics and materials manufacturing, it is studied for plasma-based surface modification or etching processes. It may be used as a reagent in advanced materials research to introduce Si–F bonds.

    gpt-5-nano

  • Solubility @25˚C

    Solvent Solubility (g/L)
    ethanol 38.95
    methanol 67.94
    isopropanol 24.98
    water 19.87
    ethyl acetate 14.51
    n-propanol 25.47
    acetone 33.77
    n-butanol 18.61
    acetonitrile 20.53
    DMF 117.86
    toluene 6.2
    isobutanol 14.26
    1,4-dioxane 29.71
    methyl acetate 19.15
    THF 47.09
    2-butanone 21.36
    n-pentanol 14.09
    sec-butanol 20.45
    n-hexane 3.81
    ethylene glycol 40.56
    NMP 107.54
    cyclohexane 11.43
    DMSO 263.54
    n-butyl acetate 14.12
    n-octanol 17.4
    chloroform 26.1
    n-propyl acetate 9.84
    acetic acid 37.03
    dichloromethane 31.44
    cyclohexanone 24.63
    propylene glycol 22.59
    isopropyl acetate 10.61
    DMAc 87.44
    2-ethoxyethanol 41.21
    isopentanol 13.2
    n-heptane 11.44
    ethyl formate 18.29
    1,2-dichloroethane 26.16
    n-hexanol 17.54
    2-methoxyethanol 69.12
    isobutyl acetate 4.09
    tetrachloromethane 8.25
    n-pentyl acetate 14.89
    transcutol 82.28
    n-heptanol 15.84
    ethylbenzene 4.52
    MIBK 9.66
    2-propoxyethanol 37.22
    tert-butanol 23.7
    MTBE 13.41
    2-butoxyethanol 29.69
    propionic acid 22.32
    o-xylene 8.41
    formic acid 61.91
    diethyl ether 21.79
    m-xylene 5.41
    p-xylene 4.58
    chlorobenzene 6.31
    dimethyl carbonate 14.97
    n-octane 5.27
    formamide 104.82
    cyclopentanone 32.4
    2-pentanone 16.69
    anisole 9.44
    cyclopentyl methyl ether 19.88
    gamma-butyrolactone 37.95
    1-methoxy-2-propanol 47.57
    pyridine 25.13
    3-pentanone 15.91
    furfural 41.14
    n-dodecane 3.45
    diethylene glycol 48.08
    diisopropyl ether 7.52
    tert-amyl alcohol 20.08
    acetylacetone 20.6
    n-hexadecane 3.71
    acetophenone 13.85
    methyl propionate 18.94
    isopentyl acetate 9.76
    trichloroethylene 27.36
    n-nonanol 16.0
    cyclohexanol 20.22
    benzyl alcohol 13.78
    2-ethylhexanol 11.51
    isooctanol 11.5
    dipropyl ether 17.49
    1,2-dichlorobenzene 8.34
    ethyl lactate 14.59
    propylene carbonate 16.99
    n-methylformamide 65.44
    2-pentanol 15.32
    n-pentane 8.01
    1-propoxy-2-propanol 32.07
    1-methoxy-2-propyl acetate 19.72
    2-(2-methoxypropoxy) propanol 28.91
    mesitylene 5.16
    ε-caprolactone 22.88
    p-cymene 8.94
    epichlorohydrin 33.3
    1,1,1-trichloroethane 10.91
    2-aminoethanol 39.01
    morpholine-4-carbaldehyde 70.46
    sulfolane 79.21
    2,2,4-trimethylpentane 2.84
    2-methyltetrahydrofuran 25.56
    n-hexyl acetate 16.25
    isooctane 1.93
    2-(2-butoxyethoxy)ethanol 37.75
    sec-butyl acetate 6.25
    tert-butyl acetate 10.8
    decalin 2.81
    glycerin 41.59
    diglyme 65.2
    acrylic acid 25.45
    isopropyl myristate 8.57
    n-butyric acid 18.21
    acetyl acetate 10.56
    di(2-ethylhexyl) phthalate 9.09
    ethyl propionate 9.97
    nitromethane 58.49
    1,2-diethoxyethane 24.02
    benzonitrile 11.99
    trioctyl phosphate 9.02
    1-bromopropane 14.73
    gamma-valerolactone 38.91
    n-decanol 12.82
    triethyl phosphate 9.92
    4-methyl-2-pentanol 8.61
    propionitrile 15.72
    vinylene carbonate 14.64
    1,1,2-trichlorotrifluoroethane 49.21
    DMS 14.29
    cumene 4.12
    2-octanol 12.33
    2-hexanone 10.17
    octyl acetate 11.26
    limonene 12.39
    1,2-dimethoxyethane 44.86
    ethyl orthosilicate 9.88
    tributyl phosphate 8.59
    diacetone alcohol 21.51
    N,N-dimethylaniline 13.57
    acrylonitrile 24.01
    aniline 13.04
    1,3-propanediol 34.86
    bromobenzene 5.51
    dibromomethane 24.1
    1,1,2,2-tetrachloroethane 32.37
    2-methyl-cyclohexyl acetate 10.21
    tetrabutyl urea 17.77
    diisobutyl methanol 10.57
    2-phenylethanol 15.31
    styrene 5.05
    dioctyl adipate 12.7
    dimethyl sulfate 30.75
    ethyl butyrate 12.92
    methyl lactate 26.98
    butyl lactate 17.98
    diethyl carbonate 9.5
    propanediol butyl ether 32.2
    triethyl orthoformate 12.3
    p-tert-butyltoluene 9.04
    methyl 4-tert-butylbenzoate 24.4
    morpholine 42.13
    tert-butylamine 17.54
    n-dodecanol 10.47
    dimethoxymethane 50.47
    ethylene carbonate 12.58
    cyrene 27.94
    2-ethoxyethyl acetate 18.59
    2-ethylhexyl acetate 8.13
    1,2,4-trichlorobenzene 10.22
    4-methylpyridine 16.96
    dibutyl ether 12.82
    2,6-dimethyl-4-heptanol 10.57
    DEF 36.15
    dimethyl isosorbide 39.78
    tetrachloroethylene 27.1
    eugenol 24.74
    triacetin 20.91
    span 80 26.17
    1,4-butanediol 19.94
    1,1-dichloroethane 13.33
    2-methyl-1-pentanol 9.93
    methyl formate 41.3
    2-methyl-1-butanol 13.21
    n-decane 5.53
    butyronitrile 13.82
    3,7-dimethyl-1-octanol 12.15
    1-chlorooctane 9.55
    1-chlorotetradecane 4.95
    n-nonane 5.69
    undecane 4.22
    tert-butylcyclohexane 2.11
    cyclooctane 6.11
    cyclopentanol 25.88
    tetrahydropyran 22.02
    tert-amyl methyl ether 14.11
    2,5,8-trioxanonane 51.89
    1-hexene 5.99
    2-isopropoxyethanol 23.77
    2,2,2-trifluoroethanol 25.4
    methyl butyrate 13.27

    Scent© AI

1 4

IFRA standard 51

Recommendation
No restriction
Maximum acceptable concentrations in the finished product (%)
Category 1
Products applied to the lips
 No restriction Category 7A
Rinse-off products applied to the hair with some hand contact
 No restriction
Category 2
Products applied to the axillae
 No restriction Category 7B
Leave-on products applied to the hair with some hand contact
 No restriction
Category 3
Products applied to the face/body using fingertips
 No restriction Category 8
Products with significant anogenital exposure
 No restriction
Category 4
Products related to fine fragrance
 No restriction Category 9
Products with body and hand exposure, primarily rinse off
 No restriction
Category 5A
Body lotion products applied to the body using the hands (palms), primarily leave on
 No restriction Category 10A
Household care products with mostly hand contact
 No restriction
Category 5B
Face moisturizer products applied to the face using the hands (palms), primarily leave on
 No restriction Category 10B
Household care products with mostly hand contact, including aerosol/spray products (with potential leave-on skin contact)
 No restriction
Category 5C
Hand cream products applied to the hands using the hands (palms), primarily leave on
 No restriction Category 11A
Products with intended skin contact but minimal transfer of fragrance to skin from inert substrate without UV exposure
 No restriction
Category 5D
Baby Creams, baby Oils and baby talc
 No restriction Category 11B
Products with intended skin contact but minimal transfer of fragrance to skin from inert substrate with potential UV exposure
 No restriction
Category 6
Products with oral and lip exposure
 No restriction Category 12
Products not intended for direct skin contact, minimal or insignificant transfer to skin
 No restriction